Advanced Semiconductor Devices

• Introduction: Short history of semiconductor devices, More-Moore, More-than-Moore, semiconductor industry, trends, prospects, overview of the course.
• Si technogies 1 - Bulk crystal and thin film deposition techniques: Crystal growth methods, physical properties, PVD (sputtering, MBE, thermal/e-beam evaporation), CVD (MO-CVD, ALD), thermal oxidation, strain in the layers, characterization methods (surface profiler, ellipsometry, 4-probe, Hall, DLTS).
• Si technogies 2 - Patterning: Photo-, EUV-, X-ray, e-beam lithography, etching (wet, dry, reactive ion) annealing, rapid thermal annealing, wire bonding, wafer bonding, 2D/3D micromachining.
• Advanced Si devices 1: MOS capacitor, accumulation/depletion/inversion, treshold voltage, defects (interface and fix charges), C-V measurement, CCD, MOS-FET.
• Advanced Si devices 2: Scaling of MOS, high-k dielectrics, Zener tunneling, leakage issue, hot carrier effects, Strained MOS (Si, Ge, SiGe), UTB-SOI, FIN Fet, tri-gate, NW transistor, prospects (ITRS).
• Advanced Si devices 3: Memory devices (SRAM, DRAM, flash), 2D semiconductor devices, power devices, Si solar cell.
• Compound semiconductors - Physics and technology: Deposition techniques, band engineering, heterojunctions (type I, II, III), band bending, p-n heterojunction, lattice mismatch, polar semiconductors, 2DEG at heterointerfaces.
• Compound semiconductor devices: Quantum well, LED (Blue, IR), laser diode, GaAS HEMT, GaN H-FET, MESFET, high frequency noise.
• Polymeric semiconductors: materials, polymer solar cell, OLED, pressure sensors, printed electronics, perovskite solar cells.
• Sensors and actuators: MEMS, physical, chemical, biological sensors, actuators, tactile sensors, robotic applications, biointerfaces, artificial nose, skin.
• Novel device platforms 1 - Spintronic devices: Giant magnetoresistance, spin valves, MRAMs, spint transfer torque, STT RAM.
• Novel device platforms 2 - Resistive switching memories: Concept of memristors, resistors with memory, electrochemical metallization cells, valence change memories, phase change memories.
• Novel computing architectures - Brain inspired computing, analog memories with tunable plasticity, in memory computing, resistive switching crossbar devices as artificial neural networks, spiking neural networks.